Phase masks are the production tool used to write gratings in fibers and waveguides. Ibsen Phase masks incorporate unbeatable, interferometric (holographic) patterning technology into a production friendly Phase mask.
– enabling single-step patterning of 2D gratings on planar wafers
Ibsen introduces 2D Phase masks for one-step generation of 2D square lattice grating patterns on planar wafers.
2D gratings can now be manufactured by the established Phase mask principles by simply exposing the wafer through an Ibsen 2D Phase mask at Bragg angle incidence, similar to the well known NFH Phase mask mode of operation (i.e. Bragg angle illumination).
By single exposure through an Ibsen Phase mask, and subsequent development of the photo-resist, and etching into the wafer, 2D square lattice grating structures as shown below can be written over large areas on a wafer.
